The semi-digestion conditions of grain sample, choice of suspension solution, temperature programmed conditions of graphite furnace and interference of matrix were studied. The method to detect the content of Cd, Pb and As in food samples by semi-digestion suspension sample injection- graphite furnace atomic absorption spectrometry was founded. The results showed that by the standard addition method, the sample was semi-digested at low temperature with suspension solution (0.2% HNO3 + 0.1% Triton X-100). Additional 450 ℃ step of graphite furnace temperature program was increased under air condition to eliminate the sample matrix, the results were satisfied. The relative standard deviation (RSD) of Cd, Pb and As were less than 5%, and their sample detection limit were 0.20, 10.4 and 11.0 g/L, respectively. The content of Cd, Pb and As in national rice standard substance detected by above method was the same with the results of standard material certificate. This method is suitable for rapid determination of Cd, As and Pb in food samples.