The contents of cadmium, lead and total arsenic in rice were determined by three types of X-ray fluorescence spectrometer and were compared with determination of cadmium by national standard GB/T 5009.15-2003, determination of lead by national standard GB/T 5009.12-2003 and determination of inorganic arsenic by national standard GB/T 5009.11-2003. The results of 67 samples showed that three regression equations were Y=0.8495X+0.0621,Y=0.6197X+0.0493 and Y=0.872X+0.0064, with correlation coefficient 0.9711,0.8509 and 0.9729, respectively, which showed a very significant correlation. The qualitative judgment correct rate reached 65.7%～91.0%. For the testing result which was in the range of 0.16mg/kg～0.24mg/kg, the qualitative judgment correct rate was 38.1%～81.0%, out of the range the qualitative judgment correct rate was 78.3%～95.7%. The quantitative judgment coincidence rate reached19.4%～44.8%. For testing result which was lower than or equal to 0.2mg/kg (≤0.2mg/kg)，its coincidence rate was 17.6%～37.3%, otherwise, the coincidence rate was 25.0%～68.8%.